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Equipment

yNano Inprint Systemz
UV Type^Thermal Curing Type

Supports 300‚‚ wafer
Best as a alternative patterning for llithography,
Best for tera bite light disk, LED, micro lens, diffusion film, high concentrated package, and etc.
Steps & repeats , with wedge error system,
pressurization, UV exposure, demolding, high-accuracy repetitive positioning,
Best for R&D and Mass production.


Super high accuracy@@Repetitive accuracy 20nm


<Structure>
1.XY axis Air Slide
2.Linear Motor
3.Linear Gage
4.Z axis Air Slider
5.Wedge error system
6.Micro Dispenser
7.Auto Focus Board
8.Substrate holder
9.Metallic holder
10.UV exposure unit
11.Air conditioning system


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